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(in Chinese) [O] Levinshtein M E, Rumyantsev S L,[] Shur M S. HQۏJS[SOPge'`NpencKbQ[M]. hghN kof_ы. SNSf[]NQHr>y 2003. [23] Muth J F, Brown J D, Johnson M A L, et al. Absorption coefficient and refractive index of GaN, AlN, and AlGaN alloys[C]. 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% TT  ?t@9v@ .LahP1&% % % TT H ?t@9v@ .LahP K!ah" Rp[SOdRQLbd\H$QLbd\ IdW\d +dW%X ;([SOSimunpLbkOMM8W#xW#+dv% % % Rp[SOdRQLbd\H$QLbd\ IdW\d +dW%X ;([SOSimunpLbkO..8W#xW#+dv% % % % % %  % % % TlOt@9v@OLahXWёyvXXXX;% % % Tt@9v@ Lah`V[6qyf[WёXWXWXWWX;Tp t@9v@LahlNEA GaAlAs/GaAs,,,,,,+,,,+,,ATq +t@9v@q LahtؚHewzzIQ5ulbchVNt'`NSc6RY XWXXWXWXWXWXWXXWXWW<TX,t@9v@,LahP91,+TTt@9v@LahP4,Tlt@9v@LahX33108,,+++TTt@9v@LahP K% % %  % % % TlOGt@9v@OLahX\O{NXXXXL% % % TXGt@9v@LahPNg٘WXTlGt@9v@LahX(1974+,,,+T`Gt@9v@LahT.10,,,TTG2t@9v@LahP-+TT3G^t@9v@3LahP),T_Gt@9v@_"Lah 7u lWS*Y^N Ile ZSX ^ NNIQ5uPge'`ċ0ONhKmxvz0LWKXWXWXKXWLWXKXWLWXWXWXXWXWXWXWW* TXO at@9v@OVLahPNzXXT| \at@9v@VLah\(1974.07,+,,,+,,TT] at@9v@]VLahP-,TT at@9v@VLahP)+T0 at@9v@V&Lah sY lWSgWN Ile UxX oRYec NNIQ5uPge'`ċ0ONhKmxvz08^,g^RXQWXXWXQXXQXWQXXWRWXWXWXWXXWXWXWXQXWWRp{[SOdRQLbd\H$QLbd\ IdW\d +dW%X ;([SOSimunpLbkOLXD8W#xW#+dv% % %  % % % T|O$t@9v@OLah\(1950.07,,,,,+,,TT$t@9v@LahP-,TT$t@9v@LahP)+T0$t@9v@&Lah 7u _lςlb]N Ile ZSX Yec ZSXu[^ NNIQ5uS\NKmՋb/gxvz0XWXWXWXXWXWXWXWXWXXWXWXWXWXWXXWXWXWXWW% % % TTM+t@9v@LahP K% % %  Tt@9v@  LahdQB\Pge[~ w~gT* t@9v@  Lah`GaN(0001)CDCCCCCDCT+ t@9v@+  LahdIQ5uS\'`vq_TxvzTT5t@9v@ LahP KRp[SO4RQLb|$QLb IdW +dW%X ;([SOSimunpLb'O8W#xW#(+dv% % % % % % % % %  % % % TTt@9v@LahPNgXTTut@9v@LahP WTTvt@9v@vLahP٘n% % % TTt@9v@LahP1% % % TX t@9v@LahP NWXTT  t@9v@ LahP WTT n t@9v@ L&" WMFC NahPzn% % % TTo  t@9v@o LahP2% % % Td  t@9v@ LahT 8^,g^WXWn% % % TT  t@9v@ LahP3% % % TT Z t@9v@ LahP K TT|Wt@9v@|LahP(,TXWt@9v@LahP1.,,TpW t@9v@LahXFUN^f[bWXWXWXTX Wt@9v@ LahP5uP[WXTXWit@9v@LahP5ulWWTXjWt@9v@jLahP] zXXT`Wt@9v@LahTf[b WXWTX Wt@9v@ LahPlWSXWTXW} t@9v@LahPFUNXWTT~ W t@9v@~ LahP XTp W t@9v@ LahX476000,++,,,TT W3 t@9v@ LahPXTX4 W t@9v@4 LahP2.+,T Wt@9v@  LahdFUNLNb/gf[b:g5u| WXWXWXWWXXWXTXWSt@9v@LahPlWSWXTXTWt@9v@TLahPFUNWXTTWYt@9v@LahP WTTZWt@9v@ZLahP + % % % Tpqt@9v@fLahX476000,,,,,+TTqt@9v@fLahPXTX>qt@9v@fLahP3.,+T?f qt@9v@?fLahpWSNt]'Yf[5uP[] zNIQ5ub/gf[b XWXWXWXXWXWXWXWXWXTXg  qt@9v@g fLahP_lςXWTX  qt@9v@ fLahPWSNXWTT qt@9v@ fLahP XTp"qt@9v@fLahX210094,+,,,+TT#Mqt@9v@#fLahP)+% % % TTNxt@9v@NfLahP K % % % TlO4 t@9v@O) LahXXd)R(uXWOWXTdY4 t@9v@) LahTё^\ g:gWXWXTxZ4 t@9v@Z) Lah\irSf[lvlyXWXXWXWTM 4 t@9v@) Lahlb/g(W݄[wl^ N_(Y^uNXWXWXWXXWXWXWXWnT`N  4 t@9v@N ) LahTGaN++BT 4 t@9v@ ) Lah`IQ5uS\B\ :NMNOXWXWXNXWnT`4 t@9v@) LahTGaN,+* % % % TO t@9v@O LahS\B\T݄[wl^vvf t@9v@ 9 LahPx% % % TX u @ t@9v@ 5 LahPGa+,% % % TTv  > t@9v@v 9 LahP1% % % TT  > t@9v@ 9 LahP-% % % TT  > t@9v@ 9 LahPx% % % TT  @ t@9v@ 5 LahPNWT @ t@9v@ 5 Lahl\O:NQB\o;mQv4gwQ gfؚvXWXWWXXWXWXWXWWV TO  t@9v@O LahdIQ5uS\'` N [sNXXWX&" WMFC .WXWXWXWnT`  t@9v@ LahTGaN,,AT 2  t@9v@ LahdIQ5u4g~gvOS0XWXWXWXWXXWWTT3 }  t@9v@3 LahP lK TdOo  t@9v@O LahTsQ.͋XXWXTo t@9v@ Lah.lSS݄[w.lSݔݔS.lIQ5u4gQB\IQ1T^xWXWXWXWXXWXWXWXWXWXXWXWXWXWXWTT o t@9v@ LahP K TpO2\t@9v@O~LahX-NVR{|SXXWXWXTd]2 t@9v@]~LahTO433,+,,TT 2bt@9v@ ~LahP?WTlc2<t@9v@c~LahXTN203,,,++Tp=2Ct@9v@=~LahX ,,,,,+TpD2P t@9v@D~LahXe.shƋxXWXWXWTTQ 2{ t@9v@Q ~LahPA+TT| 2 t@9v@| ~LahP @KRp[SO,RQLb,$$QLb,$ IdW$, +dW%X ;([SOSimunpLbOFFX8W#xW#+dv% % % Rp @Times New Roman ,RQLb,$ $QLb,$ IdW$, <:dWXG*Ax Times ew RomanTFX8W#xW#<:dv% % % % % % % % %  % % % T.t@9v@mLahtInfluence of buffer.A' A4A44;'AA''32% % % TT.Jt@9v@.mLahP % % % TKLt@9v@Km7Lahlayer material on photoemission for wurtzite GaN (0001)He ;:42`;'44 :!;AA@;':4`!.- ;A':2VA3'4!'4Z;T'::;:&% % % TTMt@9v@MmLahP KRp @Times New Roman ,RQLb,$ $QLb,$ IdW$, dWXG*Ax Times ew RomanCX8W#xW#dv% % % Rp [SO`RQLb`XD$QLb`X IdWX` +dW%X ;([SOSimunpLboOC8W#xW#+dv% % % Rp @Times New Roman `RQLb`X D$QLb`X IdWX` LdWXG*Ax Times ew Roman8W#xW#Ldv% % % % % % % % % % % % % % %  % % % Tx}Xt@9v@}DLah\Li Biao5;',% % % TT't@9v@LahP1% % % Tx Xt@9v@DLah\, Ren Y;'+;% % % TT  Xt@9v@ DLahPi% % % TT  't@9v@ LahP2% % % T < Xt@9v@ DLahl, Chang Benkang;,'+,;&,,',,% % % TT= X 't@9v@= LahP3% % % TTY  Xt@9v@Y DLahP K % % % T]t@9v@hLah(1.School of Electronic and Electrical Engineering, Shangqiu Normal University, Henan Shangqiu, 476000, ,1',,,,6'',,''+,6''''6,,,'',,1,'+,,,?,C'@,+'"%@',',1,&,,,,+,,,+, % % % T{t@9v@cLahChina;2.Department of Electrical and Mechanical Engineering, Shangqiu Polytechnic, Henan Shangqiu, @;,,',@','C',,6''''',,N'',&,''6,,+&',,1,'+,,,1,*'',,'@',&,1+',,,, % % % T>?t@9v@"Lah476000, China;3.Institute of Elect,,,,,+:,,',,",',6''% % % T@>Rt@9v@@GLahronic Engineering and Optoelectronic Technology, Nanjing University of ,,'6+,,'',,'+,@,,''',,'/'',,,+,$@',,,@,&" WMFC +'"*, % % % T dt@9v@P7LahScience and Technology, Jiangsu Nanjing, 210094, China)1'','''+,0'&,,,,,$#',,",@',,,+,,,+,:,+'% % % TT 4dt@9v@ PLahP KRp @Times New Roman ,RQLb,$ $QLb,$ IdW$, L;dWXG*Ax Times ew RomanFX8W#xW#L;dv% % % Rp @Times New Roman}Wu3WtI2iW IdW  2dW2d pG22Ax Times ew RomanFL8W#xW#2dv% % % % %  % % % TO't@9v@O Lah`Abstract:@,"''% % % TT%t@9v@LahP &% % % Tdc't@9v@LahTThe 6+'&% % % Td't@9v@d Lahdtransmission',"C"",,% % % TT9't@9v@LahP-@% % % T:'t@9v@:HLahmode GaN photocathode samples both were grown by metal organic chemical C,,'&@&?&,,,,&',,,&&"&C,'"&,,,&?''&,,?,&,*&C''&,,','&','C'' % % % TOt@9v@OLahvapor deposition, wherein the +',,,',,",,?,'',,'% % % Txt@9v@FLahformer is a sapphire/AlN/GaN structure and the latter is a sapphire/Al,C'"'"',,,'@?@'?",','',+,''&"'"',,,'@% % % TTyt@9v@yLahPx% % % TXt@9v@LahPGa@'% % % TTt@9v@LahP1% % % TT+t@9v@LahP-% % % TT,Gt@9v@,LahPx% % % TXGt@9v@HLahPN @ % % % TOJ# t@9v@OHLah/GaN structure, and the active layer in both structures was doped with p@'?,",',','+,,,',&&+',(+',,,,,,,",','",?'",,,,&,,?,,,% % % TT$ J? t@9v@$ LahP-% % % T@ Jt@9v@@ Lahltype magnesium. *,'-C',,'",C,% % % TJt@9v@ LahdThe highest 6,',,,,'" % % % T8O pt@9v@O\'Lahquantum efficiency 20% is achieved for ,,',,C''',(*,,I"(','+',,% % % TX >pt@9v@\LahPAl@% % % TT?4Zvt@9v@?iLahPx% % % TX[ pt@9v@[\LahPGa@'% % % TT4vt@9v@iLahP1% % % TT4vt@9v@iLahP-% % % TT4 vt@9v@iLahPx% % % TT N pt@9v@ \LahPNa@% % % TTO f pt@9v@O \LahP % % % Tg  pt@9v@g \Lahbuffer layer GaN photocathod,,'(*'@'@,,,,''+,,% % % T pt@9v@ \Lahe, which is much higher than '>,',"C,',,,,',', % % % TO3t@9v@OlLah$that of a AlN buffer layer GaN photocathode under identical cleaning and activation condition. The inherent ,','@@+,''*'A'@,+,,'',,+',,,',&+''''',,,',,''+',,',,,,,6,'+,'', % % % THOt@9v@O*Lahmechanism resph&WMFConsible for the fact that a C'',',#C'",,,",',,''','&% % % TX^t@9v@LahPAl@% % % TT_zt@9v@_LahPx% % % TX{t@9v@{LahPGa@'% % % TTt@9v@LahP1% % % TT t@9v@LahP-% % % TT . t@9v@ LahPx% % % TT. n t@9v@/ LahPN@% % % TTo  t@9v@o LahP % % % T t@9v@ 8Lahbuffer layer GaN photocathode can obtain higher quantum ,,''*'@'?,+,,'',,,&&',+,',,,+',+',,B % % % TOVt@9v@O Lahdefficiency ''',(*% % % TVt@9v@Lahpis also discussed."'",,"',""',% % % TTVet@9v@LahP K% % ( 6h6ah6a66g6`g6`66f6_f6_66e6^e6^66d6]d6]66c6\c6\66b6[b6[66a6Za6Z66`6Y`6Y6 6 _6X_6X 6  6 ^6W^6W 6  6 ]6V]6V 6  6 \6U\6U 6  6 [6T[6T 6 6Z6SZ6S66Y6RY6R66X6QX6Q66W6PW6P66V6OV6O6  JT."System??F?m?F?F?F-----@Times New Roman------  2 $GTJ ,JT- @ !(F-'------------ 2 $/TJ1--- 2 $3TJ ,JT'------------2 VG TJĿ ---&2 VxTJȻѧ "2 VTJNEA GaAlAs/GaAsG2 V"(TJЧչתɿƱ 2 VTJ91 2 VTJ42 VTJ33108  2 VTJ ------2 nG TJ߼飺 ---2 nzTJ 2 nTJ(1974 2 nTJ.107 2 nTJ- 2 nTJ)q2 nDTJУ̫ˣ壬ʿʦ¹о 2 GTJ 2 \TJ(1974.07 2 TJ- 2 TJ)}2 LTJŮϳˣ壬˶ʿڣ¹о ------2 GTJ(1950.07 2 qTJ- 2 vTJ)}2 |LTJУˣ壬ʿڣʿʦ¹緢Լо --- 2 TJ ---,2 ZTJ϶пṹ2  TJGaN(0001),2 WTJ緢ܵӰо 2 TJ ------------2 TJ 2 TJ 2 TJ --- 2 TJ1---2 TJ 2 )TJ 2 3TJ--- 2 ATJ2---2 CTJ --- 2 pTJ3--- 2 sTJ  2 LTJ(2 RTJ1.2 \ TJʦѧԺ 2 TJ 2 TJ 2 TJ 2 TJѧԺ 2 TJ 2 TJ 2 $TJ 2 .TJ4760002 NTJ 2 XTJ2./2 cTJְҵѧԺϵ 2 TJ 2 TJ 2 TJ 2 TJ ---2 TJ4760002 TJ 2 TJ3.A2 $TJϾѧӹ缼ѧԺ 2 }TJ 2 TJϾ 2 TJ 2 TJ210094 2 TJ)--- 2 TJ ---2 G TJժҪ 2 zTJл 2 TJﻯѧ ;2  TJʯĵ 2 TJGaN0&2 TJ緢㣬Ϊ 2  TJGaN0---\2 1G6TJʯĵ׼ľʧʧ䣬ʯĵ׺  2 1cTJGaN0&2 1uTJֱ 2 1TJAlN02 1TJ 2 1TJAl--- 2 1TJx---2 1TJGa--- 2 1TJ1--- 2 1TJ---- 2 1TJx--- 2 1TJN2 HGZTJֲͬĻϡԾвͬϵƷ˱ϴ뼤ڼ   P2 `G.TJϢϵͳֱƷĹӦ #2 `9TJЧʷֱΪ 2 `TJ13%02 `TJ2 `TJ20%0&2 `TJݼ ---S2 wG0TJĹӦΪ׼Եóݽ 2 wHTJAl--- 2 wSTJx---2 wVTJGa--- 2 w`TJ1--- 2 wcTJ---- 2 wfTJx--- 2 wiTJN ;2 ws TJΪ㼤иߵ /2 GTJ緢ܣӶʵ 2 TJGaN0/2 TJṹŻơ 2 XTJ 2 GTJؼʣ b2 q:TJأʯص㣻Ӧ 2 TJ 2 G TJͼţ 2 TJO4332 TJ 2 TJTN20342 TJ 2  TJױʶ룺 2 TJA 2 #TJ - - - @Times New Roman- - - - - - - - - - - - (2 NTJInfluence of buffer- - - 2 TJ - - - ^2 7TJlayer material on photoemission for wurtzite GaN (0001)     - - - 2 TJ @Times New Roman- - - - - - @Times New Roman- - - - - - - - - - - - - - - - - - 2 TJLi Biao7- - - 2 TJ1- - - 2  TJ, Ren Y7- - - 2 )TJi- - - 2 ,TJ2- - - "2 /TJ, Chang Benkang- - - 2 xTJ3- - - 2 {TJ - - - 2 NhTJ(1.School of Electronic and Electrical Engineering, Shangqiu Normal University, Henan Shangqiu, 476000, - - - 2 "VcTJChina;2.Department of Electrical and Mechanical Engineering, Shangqiu Polytechnic, Henan Shangqiu, 0 - - - >2 :P"TJ476000, China;3.Institute of Elect- - - v2 :GTJronic Engineering and Optoelectronic Technology, Nanjing University of - - - ^2 Q7TJScience and Technology, Jiangsu Nanjing, 210094, China)- - - 2 QTJ @Times New Roman---  @Times New Roman------ - - 2 iG TJAbstract:--- 2 imTJ - - - 2 irTJThe - - - 2 i TJtransmission- - - 2 iTJ-- - - w2 iHTJmode GaN photocathode samples both were grown by metal organic chemical - - - 82 GTJvapor deposition, wherein the - - - t2 FTJformer is a sapphire/AlN/GaN structure and the latter is a sapphire/Al- - - 2 TJx- - - 2 TJGa- - - 2  TJ1- - - 2  TJ-- - - 2 TJx- - - 2 TJN - - - w2 GHTJ/GaN structure, and the active layer in both structures was doped with p- - - 2 TJ-- - - #2 TJtype magnesium. - - - 2  TJThe highest - - - F2 G'TJquantum efficiency 20% is achieved for  - - - 2 TJAl- - - 2 TJx- - - 2 TJGa- - - 2  TJ1- - - 2 TJ-- - - 2 TJx- - - 2 TJN- - - 2 TJ - - - 52 !TJbuffer layer GaN photocathod- - - 72 TJe, which is much higher than - - - 2 GlTJthat of a AlN buffer layer GaN photocathode under identical cleaning and activation condition. The inherent - - - J2 G*TJmechanism responsible for the fact that a - - - 2 TJAl- - - 2 TJx- - - 2 TJGa- - - 2 TJ1- - - 2 TJ-- - - 2 TJx- - - 2 TJN- - - 2 "TJ - - - _2 %8TJbuffer layer GaN photocathode can obtain higher quantum - - - 2 G TJefficiency - - - &2 sTJis also discussed.- - - 2 TJ --JJTTJJSSJJSSJJSSIISSIISSIISSIISSIISSIIRRIIRRIIRRHHRRHHRRHHRRHHRRHHRRHHRRHHQQb$ 2 0@P`p2( 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p8XV~PJ_HmH nHsH tHJ`J cke $1$a$ CJKH_HaJmH nHsH tHNN ?h 1$$dBTJ@&5CJ,KH,\aJ,\2\ \eh 3$dd1$@&[$\$a$5CJKHOJQJ\^JaJ$A`$ ؞k=W[SOBi@B nfh\l_(uH**U* Qc >*B*phN@N W(@u w'$ 9r &dG$Pa$CJaJ< @< W(@u$ 9r G$a$CJaJ)@ W(@ux*O* m msonormalBR@B )ickee,g)ۏ 2dxVD^JJ 6u Char$CJKHPJ_HaJmH nHsH tH66  6le,g $G$a$CJaJPP 6 le,g Char1$CJKHPJ_HaJmH nHsH tHo s{fW 1:V!0  j#j# !$1$a$:!: 6$T le,g CharCJPJ_HaJ8Y28 F4ech~gV#-D M PK![Content_Types].xmlj0Eжr(΢Iw},-j4 wP-t#bΙ{UTU^hd}㨫)*1P' ^W0)T9<l#$yi};~@(Hu* Dנz/0ǰ $ X3aZ,D0j~3߶b~i>3\`?/[G\!-Rk.sԻ..a濭?PK!֧6 _rels/.relsj0 }Q%v/C/}(h"O = C?hv=Ʌ%[xp{۵_Pѣ<1H0ORBdJE4b$q_6LR7`0̞O,En7Lib/SeеPK!kytheme/theme/themeManager.xml M @}w7c(EbˮCAǠҟ7՛K Y, e.|,H,lxɴIsQ}#Ր ֵ+!,^$j=GW)E+& 8PK!mQtheme/theme/theme1.xmlYMoE#F{oc'vGuرhF[x=ޝzvg53NjHHzZ $ʯI)*E_N&IA!>Ǽ3xN>UWL0Č߫߿z}rx{h9T8T/χ?xY'~3S~O_|w)ӈHt=a+d NG1-RlƁ1RJwT蠯M1K"o he˓ێ½PL-|%EhY7'qP.\L=dqķ3Iofi.ñBRb-JP_pG ݢiKtdӌhFio7;7Q2ȾD>a/Q>XW ˔M_uHq)h +:Viw4rBqϫ"r!2laCbU|!8^8>ܠ,AбVt׎~ls14_=,ɬožTV G"ѦbH'.4x޵w-ϷE|F;v`b3"G 'e\fHO '$i_wp >*8i&LY%\,xҕ= r6f 3Tʅ):ªZKLs&C Mܛ0 [˫p@ע`j۽7 YHxHicT5Ar@HZAZC}i' RQ\m,zo,gQu{Y\,Nר/=L _.̇Y7C6-fSh62"5NHT[X65̫4X%Yֳ2fkhi~tCKF#b +w1m|4`!:U!p5a:~{4mmio ήc8mDJpSǹ橠V1?#Si?3E'pS2W`qB]( 08w nA[s)k8= Aa?R dڒɾcUӽ˲d)#Queb}C!&i0>4S7{z F} 4sKvUKoȳh~1jYUVH5U8Vk;֜L9ŰD ?*|FL "A3>g]dm2iVֵ褽mg %+%+ " Lpp0H!!"v#$$%d&&))j*~++,L-N./0B23T֊@‘ƕn$P$ʪFJ !"$%&'(*+,-./12345689:;?@CYZ[]^_`abcdeghijklmoq "$&+,///@233DDJ#)07<=>ABD\fnp} # % ;NPXpr5MO%+::::::::!  /Xb$qn JkHcb$^m5QO'v^5]%@ 0(  B S  ?H0(  %+ OLE_LINK6 OLE_LINK5 OLE_LINK10 OLE_LINK8 OLE_LINK17 OLE_LINK16 OLE_LINK19 OLE_LINK13 OLE_LINK20 OLE_LINK37 OLE_LINK30 OLE_LINK14 OLE_LINK25 OLE_LINK24 OLE_LINK15 OLE_LINK18 OLE_LINK21 OLE_LINK22 OLE_LINK230 He"f$$&&p*p**&+  9 J}$%W&W&****&+ab4&+&+<*urn:schemas-microsoft-com:office:smarttagschmetcnv / 0125cmFalseHasSpaceNegative NumberType SourceValueTCSCTrueUnitName   $:?K]o+78:LY[bby|  09UXdGOiqOR'*8; ,/rwz"%9<=BKN . > A L S a d y |     % ) , / 0 3 ] ` a d    ` d i s   2 5 P S e n o p s y  *eh~ "$'59:npr{   '(/0BCR #/34[apqsvyPTjl~$()*-0QTYZ]cijwzmp #,35BKMOYZ]_bk14`c !)-.DGrx{7@EM  %,JMW[]` DJuz   frfmqyQRTZ[\^efginopry+ 0 (!+!s!z!~!!!!!!K"N"""=#@###########$$$ $ $$N$Q$[$`$d$$$,%4%;%D%K%R%%%%%%%&&&&#&0&&&&%''',':'='?'T'U'V'Y'g'j'l'n's't'''''(((()(*(+(.(7(9(=(@(B(D(k(((((((((<)F)G)N)))))))))))))))))))Q*T*V*Y*_*d**************++ + + + + + +++++++!+"+#+&+mo%&z}Z^ K  jl#&JMWY Py\ c !!.$0$:$=$$$j%w%%%&9':'>'i'(?(l(((B)F)))))+++ + + + + + +++++!+"+&+3s3333333333333333333333333333333333333b j ;nX5W~5<nbg !!!""$:${%%&:'i'{''(p**++ + + + + + +++++!+"+&+XYYddee~rr(())))))))))))***++++ + + + + + + +++++!+"+&+@va _ޯM:{}D\^`\B*CJaJo(phhH[] H\H^H`\hH) \^`\hH. \^`\hH. 4\4^4`\hH)  \ ^ `\hH. | \| ^| `\hH.  \ ^ `\hH) \^`\hH.:^:`o(()\^`\)\^`\.b\^b`\. \^ `\) \^ `\.N \^N `\. \^ `\)\^`\.M:{}@va.ڗ        U        ez y+K-\L,L^I!N+%Ukp}}MP( 3!)"&#p#d$4P$U$*%YM%0&T'W|'H(+(.(!+,b,y,$-K\.P/NJ0^01;2r2,T3,4@4E4 66_q7;8;^9:J:qW:D`:[;l<?=C@>^M>KQ>?@W(@SaA BNmBCDkD!EF~!Upp#T+s]U(mzt*6VaD2P@$f)i1pH8L]|;V6bnwV?3g.mTq1S+@!aP&8 :gu +6r?N,hOuM p3a9#]VTll".@$@gMmxzZ(ja4wd"8:\E>&T#f{)\e DF\{SpM/vQy|